High-Speed SECS Message Services
The High-Speed SECS Message Services (HSMS) protocol is a standard transport protocol for communication between computers in semiconductor factories. HSMS defines a TCP/IP based Ethernet connection and is intended as a high speed alternative to the simple SECS-I protocol. Formally known as SEMI E37, HSMS is a SEMI standard.
External links
- SEMI - Semiconductor Equipment and Materials International
- Latest version of the HSMS standard
- More information on the HSMS standard
- FREESECS, an open source suite of implementations of semiconductor fab communication standards
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