List of MEMS foundries
The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.
Company | Service | Substrate materials | Production volume | Wafer diameters (in inches) | Type | Headquartered country |
---|---|---|---|---|---|---|
Asia Pacific Microsystems, Inc.(APM) | MEMS foundry, MEMS manufacturing | Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material. | High volume production | 6 | Pure-play | ![]() |
Honeywell | MEMS manufacturing | Silicon | High volume production | 4, 6 | IDM | ![]() |
Innovative Micro Technology (IMT) | MEMS manufacturing | Silicon | High volume production | 6 | Pure-play | ![]() |
iX-factory | Customised MEMS design and manufacturing | Silicon and SOI, glass borosilicate or quartz, structured wafer | Prototyping and middle-sized batch production | 4, 6, 8 | Pure-play | ![]() |
Micralyne | MEMS design, manufacturing and packaging; microfabrication | Silicon, SOI and various glasses | From scale-up to high volume production | 6 | Pure-play | ![]() |
Micrel | MEMS manufacturing | Silicon | Low volume and prototyping | 6 | IDM | ![]() |
Midwest MicroDevices | MEMS and Thin Film Device Manufacturing | Silicon, Sapphire, SOI, Glass, Quartz | Custom Process Development, Prototype, Pre-production, Small – Medium Volume Production | 4, 6 | Pure Play | ![]() |
Rogue Valley Microdevices | MEMS and Biomedical design/manufacturing | Silicon, SOI, Quartz, Glass, and Saphire | Prototyping, Pilot, Low to Mid Volume Production | 2, 4, 6, 8 | Pure-Play | ![]() |
Semefab | MEMS manufacturing | High volume production | 4, 6 | Pure-play | ![]() | |
Silex | MEMS design and manufacturing | Silicon | High volume production | 6, 8 | Pure-play | ![]() |
Sony | MEMS design and manufacturing | Polymer | Prototyping and high volume production | 6 | IDM | ![]() |
STMicroelectronics | MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) | Silicon | High volume production | IDM | ![]() | |
Teledyne DALSA | MEMS design and manufacturing with integration of individual foundry processes | Silicon and polysilicon | High volume production | 6, 8 | Pure-play | ![]() |
Texas Instruments | MEMS design and manufacturing | Silicon | High volume production | IDM | ![]() | |
Tower Jazz | IC manufacturing | Silicon | High volume production | 6, 8 | Pure-play | ![]() |
Tronics | MEMS design and manufacturing | Silicon, SOI and glass wafer | Prototyping, low and high volume production | 6 | Pure-play | ![]() ![]() |
TSMC | MEMS design and manufacturing | Silicon | High volume production | 6, 8, 12 | Pure-play | ![]() |
uFluidix | Microfluidics/MEMS design and manufacturing | Small-Large volume production | Pure-play | ![]() | ||
UMC | MEMS manufacturing | Silicon | High volume production | 8 | Pure-play | ![]() |
Xfab | MEMS design and manufacturing | Silicon and glass | High volume production | 6, 8 | Pure-play | ![]() |
ROHM | MEMS design and manufacturing | High volume production | 8 | ![]() |
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